About Us
Our company provides high-performance key components and one-stop complete customized solutions for all mainstream semiconductor process chambers, including Dry Etch, CVD, PVD, Thermal Diffusion, MOCVD, ALD, Plasma Cleaning and other core process equipment. We fully cover the full-cycle supporting demands of wafer manufacturing, from front-end chip fabrication to epitaxy production.
We are equipped with a full set of professional and sophisticated precision production equipment, including isostatic pressing furnaces, high-temperature sintering kilns, micron-level CNC grinding machines, mirror polishing equipment, ultra-clean chemical cleaning lines and ISO Class 7 cleanroom inspection stations. Our senior management team and core technical staff have accumulated more than 10 years of rich practical experience in the precision manufacturing and ultra-precision processing of semiconductor ceramic, quartz and silicon components, deeply familiar with the strict process requirements of overseas mainstream equipment brands.
All links of our production chain — raw material purification, precision machining standards, dimensional tolerance inspection, surface particle testing and ultra-clean chemical cleaning — strictly comply with international top OEM original equipment manufacturer quality standards, with stable consistency for mass production delivery. We are committed to realizing full independent research, development and production control of core semiconductor consumables including high-purity quartz parts, high-alumina ceramic components and single-crystal silicon spare parts, accelerating reliable domestic substitution to replace imported high-cost original spare parts.
We support flexible customization according to customers’ drawings, dimensional parameters, working medium and harsh plasma environment demands. We provide high-purity, low-particle, plasma-resistant high-quality finished products, as well as full-cycle professional technical services including material selection consultation, sample trial production, dimensional verification, after-sales technical support and batch delivery scheduling, fully tailored to diverse requirements of equipment manufacturers, foundry fabs and semiconductor material suppliers.
Semiconductor Components | Professional Precision Production Equipment
High-Purity Ceramic Material Series
Our ceramic precision parts are widely applicable to all kinds of semiconductor core equipment, covering Dry Etch Chambers, Ion Implanters, Thin Film Deposition Equipment, Atomic Layer Deposition (ALD) Systems, MOCVD Epitaxy Furnaces and High-Temperature Diffusion Equipment. Our main ceramic products include ceramic wafer handling arms, shadow rings, focus rings, nozzles, viewports and insulating sleeves, which can withstand high temperature, halogen plasma corrosion and strong ion sputtering under long-term continuous production conditions.
